KOBELCO PVD Technology

June 18, 2013
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June 12, 2013
Kobe Steel supplies high heat transfer titanium sheet for use in OTEC demonstration project in Okinawa
June 11, 2013
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Machinery > Products and Services > Advanced Technology Equipment > KOBELCO PVD Technology > AIP®-S Series

KOBELCO PVD Technology

AIP^®-S Series

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AIP-S series is batch system using Arc Ion Plating (AIP^®) method.
This standard system can be applicable to variable use.
AIP-S series attained both smooth surface and high deposition rate.

Features

Thick & dense film with extremely smooth surface
High deposition rate by high energy density & high ionization
Flexible operation & easy maintenance
Applicable to multi layer films & multi process films
Direct work-heat measuring system

Line-up of AIP^®-S series

	AIP-S20 For R&D	AIP-S40 For medium scale production	AIP-S70 For large scale production
Recommended Loading Space	φ220mm x Height　120mm	φ450mm x Height 500mm or φ130mm x Height 500mm x 6-axes	φ700mm x Height 700mm or φ130mm x Height 700mm x 12-axes
Arc Evaporation Source	1～3	6～12	8～16
Substrate Table	Multi Axis planetary	6 Axis planetary rotary table	12 Axis planetary rotary table

Kobe Steel, Ltd.　Machinery Business

Advanced Products and Technology Dept.

Phone: +81-3-5739-6761
Fax: +81-3-5739-6990