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Machinery > Products and Services > Advanced Technology Equipment > KOBELCO PVD Technology > UBMS Unbalanced Magnetron Sputtering System

Machinery

KOBELCO PVD Technology

UBMS™ Unbalanced Magnetron Sputtering System

UBMS™ -- Registered name of Kobe Steel
Having succeeded in refreshing the image of DLC, UBMS™- Unbalanced Magnetron Sputtering System is diversifying its application and contributing to development of Al2O3/MoS2/TiO2/SiOx/ITO, etc. ubms
Method of Sputtering Process
Argon ion is activated in plasma and hits cathode target.
Activated argon ion sputters out metal atom from target.
Film deposition is made with sputtered metal ion.

Method of Sputtering Process
Feature of UBMS™
Plasma density is increased near target by imbalance magnetic field.
Maximization of ion asseist effect
Control of Film Property
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Composition,Adhesion,
Crystallization,
Surface Morphology
Feature of UBMS™- DLC
DLC, amorphous carbon film - this name originates such features as similar to those of diamond. Bearing the following characteristic, DLC made by UBMS™ is applied to lubrication film and functional film, etc.
Smooth Surface (Rmax<0.3µm)
Smooth Surface
High Adhesion (For Carbide > 90N, For HSS > 60N)

dcl   High Adhesion
Hardness (<80Gpa)
hardeness graph
Friction Coefficient (<0.15)
friction coefficient graph
Application of DLC (Examples)
  • Dry cutting tools for Aluminum, Copper, Plastics (Drill/End Mill/Slitter/Metal Saw)
  • Aluminum can/copper tube forming tools
  • Die/mold/punch for aluminum, plastic, etc.
  • Auto parts (Locker-arm, Retainer, Cam Shaft, etc.)
  • Textile machine parts (Guide, Sleeves, etc.)
Coating Service
Please try our sample coating service for your evaluation and development. Toll coating of DLC is also available for your products.
Contact Us
Phone: 81-3-5739-6761 Fax: 81-3-5739-6990
Advanced Products and Technology Dept.
Machinery Business
Kobe Steel, Ltd.
inquiries


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