This vacuum
web coater is capable of plasma CVD and/or sputtering for transparent barrier
coating (SiO2, etc) and/or transparent conductive oxide (ITO, etc) to plastic
and metallic substrate in the roll-to-roll system.
Our
roll-to-roll deposition process has the following technological variations.
Technological Variations of Deposition Process
 Sputter
Roll to Roll Coater
For transparent conductive oxide (TCO), optical coating
and metallic coating for touch panels, FPD, photovoltaic cells, etc, by
sputtering with various kinds of sputter cathodes (DC, UBM, DMS, and Rotary
Magnetron).
 Sputter
Roll to Roll Coater
Plasma
CVD Roll to Roll Coater
For transparent barrier
coating for OLED device, electronic paper, lighting, and photovoltaic cells
by plasma discharging between a pair of electrode rollers.
Plasma CVD Roll to Roll Coater
AIP Roll to Roll Coater
For metallic compound coating by vacuum arc vaporization of target material.
The above variations meet a variety of needs in R&D and full production activities in the field of flexible electronics and energy application.
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Example
of the configuration for
Sputtering process(W35 series) |
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Lineup of Vacuum Web Coaters
1.
Roll to Roll coater for R&D and pilot production
(W35 series)
2.
Roll to Roll Coater for Mass Production (W50 series)
 1)
Small foot print, Upper and Lower chambers
Upper Chamber: for Roll installation (in clean environment)
Lower
Chamber: for Deposition
2) Film width: 1300mm, up to 2000mm
3)
Sputtering zone: up to 5, exhaust partition zone |
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W50 series for Mass Production |
3.AIP
Roll to Roll Coater
4.
Customized Equipment
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| Round Chamber and Pullout Type Roll to Roll Coater |
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Degassing Equipment |
Major Applications
1. ITO film for touch
panel
2. Display (LCD, OLED, Electronic paper) and lighting device based on plastic film (PET, PEN, etc.)
3. Flexible substrate of PI with Cu coatings
4. Thin-film photovoltaic cell based on metallic and plastic substrate.
5. Battery and Capacitor
Inquiry
Phone: +81-3-5739-6761 FAX: +81-3-5739-6990
Advances Products & Technology Department - Sales Section
Machinery Business,
Kobe Steel, Ltd.,
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