Machinery Vacuum Web Coater (Roll to Roll Coater)

Plasma CVD Roll to Roll Coater

This PE-CVD roll to roll coater can deposit SiOx (silica) barrier coating and hard coating to plastic and metallic substrate in the roll-to-roll system with Plasma CVD system with Plasma discharge between a pair of electrode rollers. It achieves an excellent barrier performance (water vapor transmission rate (WVTR) of 10-2 to 10-5order), which is required for OLED device, electronic paper, lighting, photovoltaic cells, etc..   W35 series for R&D and Pilot Production   Plasma discharge between a pair of electrode rollers.

Example of the configuration for Plasma CVD process (W35 series)

Principle

The system generates plasma between a pair of rollers connected to power supply. Since the surface of the rollers is covered with the film substrate to be coated, the system does not have powered electrodes to be contaminated with the coating, and this results in stable process during a long deposition process for a web. By using HMDSO/O2 mixture as process gases, the system is able to deposit SiOx coating as a deposition rate up to 900nm·m/min. This mechanism gives the following advantages High material use efficiency High deposition rate Low contamination As a result, it is possible for a long term stable discharge. The uniformity of deposition for a wide film is excellent because this plasma has highly uniform distribution.

Concept of CVD Roll to Roll Coater

Features

1. High deposition rate: max 900nm· m/min
2. Low contamination, stable process during a long deposition process
3. Large area deposition: highly uniform plasma for a wide film
4. Operating pressure: low operating pressure (Pa order) and low contamination
5. Coatings: Silica (SiOx, SiO2 etc), Oxide, DLC, etc
6. Precursor: safe and secure HMDSO, etc

Major Applications

1. Transparent Barrier Coating Film As usual for PE-CVD, the resulting film is flexible and relatively thick coating up to 2000nm is able to be deposited on PEN and PET substrate without any cracks or delaminations. The water vapor transmission rate (WVTR) below 5×10-4(g/m2/day) was demonstrated at 1000nm SiOx single layer coating on PEN film. 2. Hard Coating Film (Transparent Protective Coatings Film) (The data in the graphs are examples of our experiment. They are not guaranteed values.)

Barrier Performance (WVTR vs. film thickness)

Inquiry Phone: +81-3-5739-6761 FAX: +81-3-5739-6990 Advances Products & Technology Department - Sales Section Machinery Business, Kobe Steel, Ltd.,

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