This sputter roll to roll coater can deposit transparent conductive oxide (ITO, ZnO, etc) and optical coating (SiO2, SiOx, NbOx etc) in the roll-to-roll system.
 

The sputtering process is used to form transparent conductive oxide (TCO), optical coating, oxide coating, and metallic coating using various cathodes (DC, UBM, DMS, and Rotary magnetron), which are required for touch panels, FPD, photovoltaic cells, etc.
 

Our sputter roll to roll coater meets a variety of needs in R&D and full production activities in the field of flexible electronics and energy application.

2) DMS (Dual Magnetron Sputtering)

Discharging alternatively with 2 sputtering vaporization sources allows long-term stability and a high deposition rate when depositing insulation coating by reactive sputtering.

1. Roll to Roll Coater for R&D and Pilot Production (W35 series)

1) Compact design with Small footprint

2) Film width: 350mm, up to 800mm

3) Process flexibility

         ·Available various cathodes options (UBMS, DMS, and Rotary magnetron)
         ·Pre-processing Feature for Improvement of adhesion

2. Roll to Roll Coater for Mass Production (W50 series)

1) Small footprint, Upper and Lower chambers

       Upper chamber: for Roll installation (in clean environment), Lower chamber: for Deposition

2) Film width: 1300mm, up to 2000mm

3) Sputtering zone: up to 5, exhaust partition zone