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KOBELCO VACUUM WEB COATER Vacuum Web Coater (Roll to Roll Coater)

This vacuum web coater is capable of plasma CVD and/or sputtering for transparent barrier coating (SiO2, etc) and/or transparent conductive oxide (ITO, etc) to plastic and metallic substrate in the roll-to-roll system.

Our roll-to-roll deposition process has the following technological variations.

Technological Variations of Deposition Process

Sputter Roll to Roll Coater

 

For transparent conductive oxide (TCO), optical coating and metallic coating for touch panels, FPD, photovoltaic cells, window film, etc, by sputtering with various kinds of sputter cathodes (DC, UBM, DMS, and Rotary Magnetron).

Plasma CVD Roll to Roll Coater

 

For transparent barrier coating for OLED device, electronic paper, lighting, and photovoltaic cells by plasma discharging between a pair of electrode rollers.

AIP Roll to Roll Coater

 

For metallic compound coating by vacuum arc vaporization of target material.

The above variations meet a variety of needs in R&D and full production activities in the field of flexible electronics and energy application.

KOBELCO Roll coater variations

Example of the configuration for Sputtering process(W35 series)

Example of the configuration for Sputtering process(W35 series)

Lineup of Vacuum Web Coaters

1. Roll to Roll coater for R&D and pilot production (W35 series): Sputtering and/or Plasma CVD

Roll Coater for R&D and Pilot Production W35 series

W35 series for R&D and Pilot Production
  1. Compact design with Small foot print
  2. Film width: 350mm, up to 800mm
  3. Process flexibility
    • Can be equipped with sputtering, CVD, AIP, EB evaporation, etc.
    • Temperature-controlled main roller up to 300°C for heat-resistant film, flexible glass and metallic web.

2. Sputtering Roll to Roll Coater for Mass Production (W50/60S series)

Sputtering Roll to Roll Coater for Mass Production

Sputtering roll coater for Mass Production
  1. Good design for maintenance
  2. Film width: 1,300mm, 1,600mm (up to 2,000mm)
  3. Sputtering zone: up to 4, exhaust partition zone
  4. High degassing capability for plastic substrate and wet coatings

3. Plasma CVD Roll to Roll Coater for Mass Production (W60C series)

Plasma CVD roll coater for Mass Production

Plasma CVD roll coater for Mass Production
  1. Good design for maintenance, fully opened chamber
  2. Film width: 1,300mm, 1,600mm (up to 2,000mm)
  3. High speed coating with 2 coating zones
  4. Low contamination and high material utilization
  5. Uniform coating in transverse direction and machine direction

4.AIP Roll to Roll Coater

AIP Roll Coaster AIP-W500

AIP Roll to Roll Coater AIP-W500
  1. Continuous coating on metallic substrate
  2. Double-sided coating

4. Customized Equipment

Round Chamber and Pullout Type Roll Coater

Round Chamber and Pullout Type Roll to Roll Coater

Degassing Equipment

Degassing Equipment

Major Applications

  1. ITO film for touch panel, metal mesh(Cu, Ag, Al)
  2. Display (LCD, OLED, Electronic paper) and lighting device based on plastic film (PET, PEN, etc.)
  3. Flexible substrate of PI with Cu coatings(FCCL, FPC)
  4. Thin-film photovoltaic cell based on metallic and plastic substrate.
  5. Battery and Capacitor
  6. Window film
  7. Anti-bacterial film

Contact

Advances Products & Technology Department - Sales Section
Machinery Business

Kobe Steel, Ltd.

TEL:+81-3-5739-6761
FAX:+81-3-5739-6990

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