Diamond Thin Films

Diamond Thin Films

Diamond films are expected to be the most promising semiconducting material. Kobe Steel is developing diamond film technology for electronic devices, and capable of synthesizing diamond films with controlled textures and surface morphologies by chemical vapor deposition (CVD). Electronic characteristics of diamond films can be greatly improved by using highly-oriented and heteroepitaxial diamond films.

Polycrystalline diamond film	Highly oriented diamond film	Heteroepitaxial diamond film

Randomly-oriented polycrystalline diamond film	Highly (001)-oriented diamond film on silicon (001)	Highly coalesced (111) diamond film on platinum (111)

Applications

Active electronic devices such as ultraviolet LED, high-speed switches, and high-power transistors
Passive sensors including thermistors, pressure sensors, and radiation detectors
Thermal management for electronic components
Optical elements
Chemical electrodes for chemical- and bio-sensors, waste water treatment, and chemical industries

Would you like to know more about diamond?

What is diamond? ........ (1) Properties of semiconducting materials

How can we make diamond films? ........ (2) Microwave plasma CVD

How can we use diamond films? ........ (3) Various applications of diamond films

What's new in research? ........ (4) List of our achievements and new topics

What are industrial applications? ........ (5) Licensing intellectual properties

Topics
       The following paper is published on Nature, Vol. 399, pp. 340-342 (1999)
     "Epitaxial diamond growth on sapphire in an oxidizing environment"
               (co-authored with Prof. Yoshimoto of Tokyo Institute of Technology)

Contact address:	Electronics Research Laboratory KOBE STEEL, LTD.
SP3carbon%ml.kcrl.kobelco.co.jp (Attention! To block spam messages out, e-mail address is shown as above. Please replace '%' to '@' to sending us your e-mail.)
TEL: +81-78-992-5614 / FAX: +81-78-992-5650