Rotor materials for turbomolecular pumps used in semiconductor manufacturing equipment
Front-end Process
Rotor materials for turbomolecular pumps that are important for vacuum exhausting
Turbomolecular pumps are required to have high temperature strength as the exhaust performance increases. KOBELCO can manufacture materials having superior high temperature strength, machinability, and uniformity.
(After machining)
(Before machining)
Features
Because it is possible to manufacture in an integrated manner from the material, the characteristics required for the rotor materials for turbomolecular pumps can be fully satisfied.
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