Hydrogen generators (for semiconductor factories)
Front-end Process
Support carbon neutrality and respond to various hydrogen needs in the semiconductor manufacturing process.
High-pressure hydrogen oxygen generators (HHOG) supply hydrogen gas on site by electrolysis of water using proton exchange membrane.
Used in production processes and demonstration facilities by manufacturers of semiconductor/equipment/material, with a track record of over 30 years.
Features
- Simple operation and maintenance
- High purity hydrogen (oxygen) gas is generated
- High safety and reliability
- Clean working environment
- Extensive track record of delivery
System flow of hydrogen gas generator
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