Hydrogen generators (for semiconductor factories)

Front-end Process

Supporting carbon neutrality initiatives and addressing diverse hydrogen needs in semiconductor manufacturing processes.

The water electrolysis-based high-purity hydrogen generation system (HHOG™) produces hydrogen gas using a polymer electrolyte membrane and supplies it on-site.
The system has been widely used for hydrogen gas supply in various processes and demonstration facilities at semiconductor, equipment, and materials manufacturers, with over 30 years of delivery records since its launch in the 1990s.
A dedicated maintenance team backed by extensive experience ensures a comprehensive support system for reliable hydrogen supply.

Seller: Kobelco Eco-Solutions Co.,Ltd. (Japanese site)

Features

  • Simple operation and maintenance
  • High purity hydrogen (oxygen) gas is generated
  • High safety and reliability
  • Clean working environment
  • Extensive track record of delivery

System flow of hydrogen gas generator

Product line-up (Japanese site)

A wide lineup is available, with hydrogen generation capacities ranging from 5 Nm³/h to 100 Nm³/h. More than 10 installations of the 100 Nm³/h model have been delivered.
Implementation examples (Japanese site)

As a leading domestic manufacturer, we have delivered over 260 systems for industrial applications including semiconductors, R&D, demonstration projects, and hydrogen energy utilization both in Japan and overseas.

Contact Us

You can reach us by clicking the inquiry button.

Inquiry
  1. TOP
  2. Products & Services
  3. Semiconductor
  4. Hydrogen generators (for semiconductor factories)