Glass linings (semiconductor manufacturing equipment)
Glass-lined composite materials with minimum metal ion elution from the surface
Glass-lined (GL) products are also used widely in the production of electronic materials such as resists, sealants, and CMP slurry used in the semiconductor manufacturing process. Our line-up includes HybridGL (HYX series) that has electric conductivity and high thermal conductivity in addition to low elution that matches the users’ process by making low elution glass 9500 with a sodium ions elution amount of about 1/10 of conventional glass.
Seller: Kobelco Eco-Solutions Co.,Ltd.
Product line-up
Powder treatment equipment and thin film evaporators
Our line-up also includes multifunctional filter dryer (FD)with which filtration, washing, and drying can be conducted in the semiconductor resist manufacturing process. To prevent contamination as products become more highly purified, we are now developing an equipmnet with PTFE coated on the metal liquid-contacting surface inside equipment.
In addition to the filter dryer, we also have, as equipment applicable to chemicals for semiconductors and to the manufacturing process of products, the thin film evaporator WIPRENE, with which high purification can be achieved by evaporation removal of impurities in the product. Please feel free to contact us for details.
Examples
Glass-lined (GL) products can also be applicable to products other than those requiring low elution at the liquid-contacting surface, such as reactors and tanks used to produce resists, etc. (for example, outgassing preventive coatings, inner coatings of vacuum vessels, etc.). Please feel free to contact us for details.
- *There may be some limits due to restrictions in the glass-lining process.
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