Heat pumps (for semiconductor factories)

Front-end Process

Energy saving equipment providing large thermal energy with small input energy

Heat pumps generate cold/warm water by heat-exchange between water and a refrigirant cooling medium. As energy saving equipment they can significantly cut running costs because the obtained thermal energy is several times more than the input energy, thus helping to realize decarbonization in the semiconductor manufacturing process.

Responsible company: Kobelco Compressors Corporation (Japanese site)

Features

  • The highest efficiency in the industry
  • High durability due to the use of our own screw compressors
  • Wide range of supply temperature (cold water down to 5℃, warm water up to 95℃)
  • Overwhelming space saving compared with other heat source equipment.

Implementation image in clean room

Air conditioning of clean rooms

Uses cold water for dehumidification inside the clean room and warm water for reheating. Replacing the conventional system of “cold water chiller + steam boiler” with a heat pump can achieve large energy savings and CO2 reduction.

Pure water heating

Heat pumps can be utilized for heat recovery from warm waste water. When warm water generated by the recovery of exhaust heat is used to heat the Pure Purified water for semiconductor cleaning, and the heat source is changed from a boiler to a heat pump, it is possible to improve energy efficiency.

Implementation examples

The use of cold/warm water in the clean room air conditioning cut the running cost by 78%. (Japanese site)

The use of a heat pump in the cold/warm water production system realized efficient energy utilization.
The use of a heat pump in the pure water heating process realized efficient energy utilization (Japanese site)

Replacement of the boiler with a heat pump as the heat source realized efficient energy utilization.

Product line-up

HEM III: low GWP, ultra high efficiency water cooled efficient water-cooled heat pump (Japanese site)

GWP (Global Warming Potential) can be cut maximum 90% because of using Low GWP rerfrigirant R454C and R454A.
HEM II: ultra high efficiency water cooled inverter screw chiller (Japanese site)

The highest efficiency module chiller in the industry COP6.0 IPLV9.2
List of heat pump products (Japanese site)

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