Precision Cleaning of Semiconductor Manufacturing Equipment

Front-end Process Back-end Process

We remove the contaminants such as particles and metals by cleaning the component parts of manufacturing equipment in efficient and environmentally-friendly manners.

  • Support for stable operation of semiconductor manufacturing equipment
  • Selective removal of contaminants without damaging base materials
  • Contribution to cost reduction by making the component parts reusable
  • Provision of rare metal recovery services

Seller: MC Evolve Technologies Corporation

Cleaning of ion implantation equipment components

Contamination example: Arsenic

Rare metal recovery services

Cleanroom operations

Shower plate refurbishment and cleaning

Handled items

Components of sputtering equipment, CVD equipment, ion implantation systems, etching equipment, vacuum deposition equipment, and ion plating systems; protective components, piping, and materials such as quartz, ceramics, resins, and glass

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